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Examination of the pulsing phenomena in pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS) of Cr–Al–N thin films - ScienceDirect
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Figure 3 from Magnetron sputtering: a review of recent developments and applications | Semantic Scholar
![Schematic drawing of the closed field unbalanced magnetron sputtering... | Download Scientific Diagram Schematic drawing of the closed field unbalanced magnetron sputtering... | Download Scientific Diagram](https://www.researchgate.net/publication/223622057/figure/fig1/AS:393914851840000@1470928027040/Schematic-drawing-of-the-closed-field-unbalanced-magnetron-sputtering-system.png)
Schematic drawing of the closed field unbalanced magnetron sputtering... | Download Scientific Diagram
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Schematic of the closed-field unbalanced magnetron sputtering system... | Download Scientific Diagram
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Aluminium nitride piezoelectric thin films reactively deposited in closed field unbalanced magnetron sputtering for elevated temperature 'smart' tribological applications
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Microstructure and optical properties of MgO films synthesized by closed-field unbalanced magnetron sputtering with additional electron emission - ScienceDirect
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Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films | Scientific.Net
Reactive close field unbalance magnetron sputter deposition of titanium dioxides for potential photovoltaic applications
![Schematic diagram of the closed-field (unbalanced) magnetron sputtering... | Download Scientific Diagram Schematic diagram of the closed-field (unbalanced) magnetron sputtering... | Download Scientific Diagram](https://www.researchgate.net/publication/231126609/figure/fig1/AS:358271153131522@1462429907361/Schematic-diagram-of-the-closed-field-unbalanced-magnetron-sputtering-setup.png)
Schematic diagram of the closed-field (unbalanced) magnetron sputtering... | Download Scientific Diagram
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